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Mass Flow Controller Meter Product List

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Coriolis mass flow controller/meter "QuantimQMC"

Coriolis mass flow controller/meter "QuantimQMC"

The new 3rd generation Quantim QMC Coriolis flow meter is suitable for applications involving the measurement and control of small flow rates of gases and liquids.

The Quantim® QMC Coriolis mass flow controller and meter provide extremely accurate, stable, and reproducible measurement and control for very low flow rates of gases and liquids. This third-generation new Quantim QMC Coriolis mass flow controller and meter contribute to shortening the scale-up period from lab to pilot plant to production by enhancing process quality, production yield, and throughput. The new Quantim QMC Coriolis mass flow series is compatible in terms of mounting dimensions and functionality with the old models of Quantim from Brooks Instrument. 【Features】 ■ True mass flow measurement ■ Accurate density measurement ■ Additional I/O options: 0-10 Vdc, 0-20 mA, RS485 S-Protocol ■ A wide range of seal materials, certificates, and certification options ■ Easily accessible service port *For more details, please refer to the related link page or feel free to contact us.

  • Flow Meter
  • Flow Control
  • Mass Flow Controller Meter

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Mass Flow Controller/ Meter "5850E Series"

Mass Flow Controller/ Meter "5850E Series"

Excellent long-term stability, maintaining production accuracy! We perform highly reliable, precise, and repeatable measurements and controls.

The "5850E Series" is an elastomer-sealed thermal mass flow controller/meter. This series has a proven track record of being actively used in thousands of applications worldwide for several decades, equipped with a unique stable flow sensor that provides high reliability, accuracy, and repeatability necessary for the demanding industrial production processes of today. 【Features】 ■ Removable flow sensor ■ No influence from mounting position ■ Mechanical/electrical compatibility with other mass flow controllers ■ Electric valve override ■ Corrosion-resistant valve *For more details, please refer to the related link page or feel free to contact us.

  • Flow Meter
  • Flow Control
  • Mass Flow Controller Meter

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Metal Seal Mass Flow Controller/ Meter "GF125 Series"

Metal Seal Mass Flow Controller/ Meter "GF125 Series"

MFC that makes everything possible

The "GF125 Series," equipped with ultra-fast response times and high levels of cleanliness, is a second-generation multivariable measurement, PTI (Pressure Variation Resistance) metal-sealed mass flow controller. It minimizes fluctuations in process gas flow due to variations in pressure and temperature. With standard MultiFlo technology, it supports thousands of combinations of gas types and ranges without disconnecting from the gas line or sacrificing accuracy. As a result, it reduces the need for pressure regulators, pressure transducers, and related hardware installations at each point, thereby shrinking the size and cost of gas panels while maximizing yield and productivity with industry-leading PTI performance. 【Features】 ■ Long-term zero stability: less than 0.5% full scale/year ■ Settling time: less than 300 ms - 700 ms ■ Maximum full-scale flow rate: 300 slpm ■ Metal-sealed flow path: 4µ inch Ra surface finish ■ SEMI F20 compliant materials for gas and liquid contact parts ■ Corrosion-resistant Hastelloy® T-Rise sensor, etc. *For more details, please download the PDF or feel free to contact us.

  • Flow Control
  • Flow Meter
  • Mass Flow Controller Meter

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Thermal Mass Flow Controller/ Meter "SLA5800 Series"

Thermal Mass Flow Controller/ Meter "SLA5800 Series"

Acquisition of certification from the High Pressure Gas Safety Institute (KHK). Simplification of the completion inspection procedures in the prefectures. Also obtained the type approval certificate for domestic explosion-proof (JPEx).

The thermal mass flow controller/meter "SLA5800 series" is equipped with gas control and measurement functions that are useful for research and development of carbon neutrality, and is compatible with gases such as hydrogen, methane, LNG, carbon dioxide, and ammonia. The "SLA5850 mass flow controller with normally closed valve" has obtained certification from the High-Pressure Gas Safety Institute of Japan (KHK), allowing for a very smooth introduction as the completion inspection in prefectures can be completed with just the submission of the certification. (It is also possible to respond with a flow meter.) 【Features】 ■ Obtained type certification for domestic explosion-proof (JPEx) from DEKRA (Applicable products: mass flow controllers/meters, pressure controllers) ■ Active in fields such as chemicals, petrochemicals, fuel cells, and life sciences ■ Flow range that covers a wide spectrum ■ Capable of handling multiple gases and flow ranges with a single unit *For more details, please refer to the catalog. Feel free to contact us with any inquiries.

  • Safety Controller
  • Flow Meter
  • Flow Control
  • Mass Flow Controller Meter

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Metal Seal Mass Flow Controller/ Meter "GF100 Series"

Metal Seal Mass Flow Controller/ Meter "GF100 Series"

Applications for gas flow control with excellent response speed and repeatability.

The "GF100 Series" is a metal-sealed mass flow controller/meter that achieves high purity and ultra-high purity process gas supply with excellent response speed and repeatability. It ensures high repeatability and stable performance, providing reliability that exceeds industry standards. It achieves the highest level of gas cleanliness in the industry while enhancing process flexibility and efficiency, maximizing yield and productivity. 【Features】 ■ Long-term zero point stability: less than 0.5% full scale/year ■ Settling time: less than 700 ms - 1 second ■ Maximum full-scale flow rate: 300 slpm ■ Metal-sealed flow path: surface finish options of 4µ or 10µ inch Ra ■ Corrosion-resistant Hastelloy(R) T-Rise sensor improves measurement reproducibility even with rising temperatures, among other features. *For more details, please download the PDF or feel free to contact us.

  • Flow Control
  • Flow Meter
  • Mass Flow Controller Meter

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マスフローコントローラ/メータ『GF40シリーズ』

マスフローコントローラ/メータ『GF40シリーズ』

デバイス1台でさまざまなガスと流量に対応し、柔軟な対応を実現しました！

『GF40シリーズ』は、当社独自のMultiFloテクノロジーを搭載したサーマル式のマスフロー コントローラ/メータです。 さまざまなガスを使用する場合、ガスの種類を頻繁に変更する場合、制御精度は維持したまま、 フルスケールレンジを変更する必要のあるシステムやプロセスに好適です。 MultiFloテクノロジーは、比類のない柔軟性を提供します。 1台のデバイスで、数千パターンの異なるガス・流量範囲の組み合わせに対応しています。 【特長】 ■専用のソフトウェアで設定変更が可能な、マルチガス/マルチレンジ機能 ■エラストマシールのオプションが豊富ため、さまざまなガスに対応 ■長期安定性に優れたハステロイ製センサを採用 ■実ガス試験に基づく100種類以上のガスデータを搭載 ■負荷の高いアプリケーションでも、1秒未満の応答時間とセットポイント 　±1%の制御精度を実現 ※詳しくは関連リンクページをご覧いただくか、お気軽にお問い合わせ下さい。

  • Flow Meter
  • Flow Control
  • Mass Flow Controller Meter

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Mass Flow Controller/ Meter "4800 Series"

Mass Flow Controller/ Meter "4800 Series"

Ultra-fast response for flow processes focused on speed! Suitable for a wide variety of non-corrosive gases.

The "4800 Series" is a thermal mass flow controller/meter with elastomer seals that improves process efficiency and productivity as response time improves. The advanced MEMS thermal sensor is equipped with a dedicated PID algorithm optimized for response to the control valve, allowing the product to quickly follow the actual flow rate even when the set point is changed arbitrarily. 【Features】 ■ Flow response time (settling time) of 0.75 seconds or less ■ Innovative MEMS sensor and dedicated PID algorithm ■ Compact size, half that of conventional thermal MFCs ■ Digital compatibility via RS-232 ■ Optional Local Operator Interface (LOI) to streamline setup and operation *For more details, please refer to the related link page or feel free to contact us.

  • Flow Meter
  • Flow Control
  • Mass Flow Controller Meter

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Thermal Mass Flow Controller/ Meter "SLA5800 Series"

Thermal Mass Flow Controller/ Meter "SLA5800 Series"

Acquisition of certification from the High Pressure Gas Safety Association (KHK). Simplification of the completion inspection procedures by prefectures. Also obtained the type inspection certificate for domestic explosion-proof (JPEx).

The SLA5800 series can handle up to 14 types of pressure and flow with a single unit, achieving high reproducibility and precise control. The thermal mass flow controller/meters "SLA5800 series" support a variety of applications, including research and development related to carbon neutrality, enabling high-precision control and measurement for gases such as hydrogen, methane, LNG, carbon dioxide, and ammonia. Furthermore, the "SLA5850 mass flow controller (normally closed valve)" is certified by the High Pressure Gas Safety Association (KHK), and completion inspections at the prefectural level can be handled simply by submitting the certification. This significantly simplifies the procedures during installation and ensures a smooth equipment startup. *Support for flow meter specifications is also available. 【Features】 ■ Obtained type approval certificate for domestic explosion-proof (JPEx) from DEKRA (Applicable products: mass flow controllers/meters, pressure controllers) ■ Active in fields such as chemicals, petrochemicals, fuel cells, and life sciences ■ Flow range covering a wide spectrum ■ Capable of handling multiple gases and flow ranges with a single unit *For more details, please refer to the catalog. Feel free to contact us with any inquiries.

  • Safety Controller
  • Flow Meter
  • Flow Control
  • Mass Flow Controller Meter

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Mass Flow Controller/ Meter GF40 for Metal Processing and Heat Treatment

Mass Flow Controller/ Meter GF40 for Metal Processing and Heat Treatment

Mass flow controllers/meters that adopt thermal flow measurement technology and elastomer seal structures, achieving a balance between cost performance and high precision control.

In metal processing and heat treatment processes, the stability of gas flow and control accuracy significantly influence product quality. Thanks to the high measurement accuracy and reproducibility unique to thermal methods, stable supply of protective gases and reactive gases is achieved. This helps to suppress process variations and contributes to uniform heat treatment quality. The elastomer seal design allows for flexible adaptation to general industrial applications and excels in maintainability. It supports reliable flow management for the control of protective gases such as nitrogen and argon in vacuum furnaces and atmosphere furnaces, brazing and sintering processes, and various metal component manufacturing lines. This contributes to stable operation of equipment and improved yield. With precise flow control, achieve stable heat treatment quality. The GF40 series is a solution that combines practicality and reliability in the field of metal processing and heat treatment. 【Features】 ◎ 'GF40 Series' ■ Equipped with abundant actual gas data ■ Can change gas types and flow ranges, allowing a single unit to address diverse research themes ◎ '0254' ■ Flow setting supports instantaneous control and batch control, with flow display accommodating both instantaneous and cumulative readings ■ Space-saving design allows connection of up to four mass flow controllers/meters.

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  • Electrical Instruments/Electrometers
  • Mass Flow Controller Meter

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